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Manufacturing

The power of sound to make microfluidics active.

We integrate surface acoustic wave technologies with microfluidics.

Wir sind die SAW-Experten, haben jahrelange Erfahrung beim Design und bei der Herstellung von akustofluidischen Chips und Systemen, haben alle Fehler schon mal gemacht und wissen daher, wie es geht. Unsere patentierte lithografische Fertigungstechnologie erlaubt die Integration von SAW-Wandlern und beliebig geformten Mikrokanälen auf Waferlevel.

Acoustofluidic chip and wafer manufacturing

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Bildergalerie mit Bildunterschriften: schönes Bild von komplettem Wafer, Detailsausschnitte mit IDTs, Kanalstrukturen, FIB-REM Aufnahme von Kanal Querschnitt

Angebote/Chipvarianten: Chips für Partikelsortierung, Chips für Aerosolerzeugung

IDT-Fertigung: Herstellungstechnologien, Geräte, Materialien (vgl. Flyer für Acoustofluidics Conf.)

IDT Layouts, Strukturgrößen und Funktionen

Kanalfertigung: Technologien, Geräte, Materialien, Kanallayouts, Strukturgrößen

Joint R&D projects and chip/wafer production as a service
Customized chip/wafer layout design
Rapid prototyping via laser lithography (≥ 2 µm resolution) andelectron-beam lithography (≥ 0.2 µm)
Evaporation of various metals, high-quality SiO2 sputtering, reactive ion etching, analytics
Microchannel fabrication via epoxy lithography (DFR) or PDMS molding

Microfluidic channel prototyping

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Bildergalerie: Bild des 80 cm langen Kanals mit Beschreibung, Bilder von verschiedenen Strukturen- und größen (z.B. Zellmechanik)

Kanal- und Substratmaterialien, Kanalbreiten, Kanalhöhen,

PDMS master wafer manufacturing

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Bildergalerie: Bilder des Wafers mit verschiedenen Teststrukturen, Bilder von verschiedenen Strukturen- und größen

Struktur- und Substratmaterialien, Strukturbreiten und -höhen,

Publications & Patents

Surface acoustic wave nebulization improves compound selectivity of low‑temperature plasma ionization for mass spectrometry, Scientific Reports | (2021) 11:2948 | https://doi.org/10.1038/s41598-021-82423-w

Blood platelet enrichment in mass-producible surface acoustic wave (SAW) driven microfluidic chips, Lab Chip, 2019, 19, 4043–4051

Droplet Generation in Standing-Surface-Acoustic-Wave Nebulization at Controlled Air Humidity, Phys. Rev. Applied 14, 014071

Compact SAW aerosol generator, Biomedical Microdevices volume 19, Article number: 9 (2017)

SAW-based fluid atomization using mass-producible chip devices, Lab Chip 15, 3793-3799 (2015)

Partners and Suppliers

We are closly working together with several suppliers for microfluidic equipment and components

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Scientific Cooperations

We are closly working together with several suppliers for microfluidic equipment and components

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Awards

We are closly working together with several suppliers for microfluidic equipment and components

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Cell and Particle Sorting

We bring microfluidics to action. Just some more thext to see how fonts look like in writing. Avenir Light

Cell and Particle Sorting

We bring microfluidics to action. Just some more thext to see how fonts look like in writing. Brandon

Cell and Particle Sorting

We bring microfluidics to action. Just some more thext to see how fonts look like in writing. Futura Light

We bring microfluidics to action. Avenir

We bring microfluidics to action. Barlow

We bring microfluidics to action. Brandon

We bring microfluidics to action. DIN Next

We bring microfluidics to action. Futura

We bring microfluidics to action. Lato

We bring microfluidics to action. Marzo

Microscale Aerosol Generation

We bring microfluidics to action. Just some more thext to see how fonts look like in writing. Barlow Light

Microscale Aerosol Generation

We bring microfluidics to action. Just some more thext to see how fonts look like in writing. DIN Next

Microscale Aerosol Generation

We bring microfluidics to action. Just some more thext to see how fonts look like in writing. Lato

We innovate microfluidics / innovating microfluidics

We activate microfluidics / activating microfluidics

We enhance microfluidics

We bring microfluidics to a new dimension / bringing microfluidics to a new dimension

We add a new dimension to microfluidics / adding a new dimension to microfluidics

Microfluidics becomes active

We bring microfluidics to action. Lulo

We Bring Microfluidics To Action. KODCHASAN

We Bring Microfluidics To Action. Kanit

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